Used KARL SUSS / MICROTEC MA 1006 #9006500 for sale
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ID: 9006500
Wafer Size: 6"
Mask aligner, 6"
(1) Micron resolution on 6" wafers
Split field microscope with (6) objectives
1000 W Power supply.
KARL SUSS / MICROTEC MA 1006 is a highly advanced mask aligner system capable of producing reliable, accurate masks for micro-lithographic applications such as semiconductor device fabrication. The system uses optical lenses and a two-axis alignment system to accurately align the mask and the substrate. A bottom view camera aids the user in presenting their masks to the stage while a top view camera helps in accurate placement of the substrate. MICROTEC MA 1006 can achieve a minimum alignment error of 2.5µm which is essential for devices with geometries under 2µm. KARL SUSS MA-1006 has a variety of features that increases reliability and minimizes errors in the production process. The programmable alignment process screen allows for full image capture and movement of the mask and the substrate according to user specifications. Built in filters help eliminate any noise from the optics and a 5nm resolution motion control helps ensure accuracy of the alignment. MA 1006 also comes with an auto focus feature, which can be used for aberration correction and for controlling mask focus. KARL SUSS MA 1006 is equipped with an ergonomic design, making it comfortable to use. Heavy duty optics increase durability and are temperature stable to ensure accuracy even when cleaned. It also includes a wide variety of connection ports to facilitate easy integration with other equipment. Overall, KARL SUSS / MICROTEC MA-1006 is a powerful and reliable mask aligner. Its advanced features, precision and ease of use makes it ideal for high accuracy semiconductor device fabrication and shortens the production process. With proper maintenance, this mask aligner has the potential to provide years of reliable service.
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