Used KARL SUSS / MICROTEC MA 1006 #9180520 for sale
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ID: 9180520
Wafer Size: 4"
Vintage: 2004
Contact aligner, 4"
Type: ZE1000G / 175944
(6) Objectives
Reticle vacuum holder: Chucks, 2"-6"
2004 vintage.
KARL SUSS / MICROTEC MA 1006 is a highly precise, fully automated mask aligner designed to meet demanding photolithography requirements. This advanced tool is perfect for high resolution 6-inch and 8-inch photolithography tasks. It is ideal for creating integrated circuits, MEMS, and other devices on substrates such as silicon, metal, glass, and compound materials. This tool gives users the ability to accurately align masks with a resolution of down to 0.5 micron and depth of focus of up to 100 micron. It also offers the flexibility to import data from industry standard formats such as GDSII and OpenAccess, allowing quick and easy setup. MICROTEC MA 1006 is equipped with a motorized optical system for both coarse and fine alignment, offering excellent repeatability and accuracy. For further accuracy, KARL SUSS MA-1006 provides an optional multi-angle version that can adjust the alignment angles from one to five different angles. The precision automation software allows users to create, edit and monitor parameters to guarantee maximum process accuracy for even the most demanding alignment requirements. The system includes an integrated metrology station, providing real-time alignment control, as well as a full range of capabilities for analyzing and documenting alignment results with sublinear performance. Moreover, this tool uses advanced technologies such as photoresist dispense and post-exposure bake (PEB), enabling users to optimize wafer throughput. It also has a wide range of input and output capabilities, including a full complement of communication protocols, such as Ethernet, USB, and serial ports. Its user-friendly and intuitive graphical user interface makes data handling and setup easy and efficient. This mask aligner is extremely robust, providing reliable, safe, and stable operation with a minimum of maintenance. It has an advanced safety system with a manual and electrical safety cut-off button for a safe working environment. MA-1006 is also fully upgradable, offering the possibility to configure it with optional features such as improved overlay accuracy, larger sheet format, and advanced automation tools.
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