Used KARL SUSS / MICROTEC MA 100E #293668185 for sale

ID: 293668185
Vintage: 2010
Mask aligner 2010 vintage.
KARL SUSS / MICROTEC MA 100E Mask Aligner is a state-of-the-art device used in the microfabrication of precise, lithographically-patterned substrates. This mask aligner is used to accurately place a pre-patterned mask over a substrate, which is then exposed to ultraviolet light to produce the desired pattern on the substrate. MICROTEC MA100E has precision motions which operate in the x, y and z directions, and which are controlled through a computerized interface. This allows for precise placement of the mask over the substrate. It has a highly accurate, automated sample handling mechanism which ensures that the alignment is correct even when using thick samples. It also features an adjustable height shutter which enables larger substrates to be used with the equipment, along with two focusing mechanisms which allow for clear imaging at various magnifications. KARL SUSS MA 100 E Mask Aligner utilizes a high-precision movable stage with an extremely high accuracy in the x, y and z axes. This enables it to reliably and quickly position masks over substrates with nanometer level precision. The areas of the stage which are in contact with the mask and substrate, are lapped and electrical discharge machined to ensure a good contact is maintained between the substrate and the mask, thus providing precise alignment. In order to reduce pattern distortion, MA100E is equipped with a patented pre-alignment system, which is comprised of two separate components. One component uses reference markers to correct stage position errors, while the other uses a patented fixed-optics alignment unit to perform alignment between the chip and the mask. This ensures that accurate disposition is achieved within a short period of time and with minimal room for operator error. MA 100E Mask Aligner is a versatile and reliable machine, which provides superior resolution for patterning substrates. With its high accuracy and precision, MICROTEC MA 100E offers the highest quality lithographic results in the industry.
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