Used KARL SUSS / MICROTEC MA 100E #9185932 for sale

KARL SUSS / MICROTEC MA 100E mask aligner is an advanced semiconductor processing equipment designed for rapid and precise alignment of photolithographical patterns onto a substrate. It is used for fabrication of complex devices for applications such as flat panel displays, integrated circuits, and microelectromechanical systems (MEMS). The aligner has a highly accurate, high-resolution optical system that utilizes chromatic aberration compensation (CAC) to ensure optimal image formation. The CAC unit provides improved resolution for features that are small and difficult to accurately identify and align. MICROTEC MA100E offers automated pattern recognition and alignment capabilities to simplify the alignment process. It utilizes a unique combination of laser-based vision systems and precision x-y drive mechanisms to accurately measure and interpolate pattern edge positions. This ensures precise alignment within one μm or smaller. The machine also has a high-speed Z-axis drive machine with a resolution of 40 microns, which allows for rapid exposure of patterns onto surfaces of varying thicknesses. It has a high exposure field that can accommodate substrates up to 6 inches in diameter. In addition, the machine has touchscreen controls that can be programmed for automatic operation or manual control. The tool also provides integrated wafer handling systems, fully automated fluidics, proximity sensors, and a vacuum chuck to facilitate a range of processes. KARL SUSS MA 100 E is compatibile with a range of exposure times, from 10 to 500 seconds, and is compatible with a wide variety of chemistries and resist materials. For advanced mask aligning capabilities, KARL SUSS MA 100E is an ideal choice. Its unique combination of features and functions provides the ideal solution for creating complex devices with exceptional precision.