Used KARL SUSS / MICROTEC MA 100E #9185936 for sale

KARL SUSS / MICROTEC MA 100E is an advanced mask aligner with a large working area for a variety of photolithography applications. With a large maximum range working area of 150 x 150mm and programmable controlled focusing and beam power, MICROTEC MA100E provides a high degree of precision and accuracy. The device comes equipped with four lithography projection lenses with a numerical aperture range from 0.5 to 0.75 and a 0.2X reduction lens for flexibility in working with different sizes, substrates, and applications. The device is designed for medium to high volume lithograpy, and offers a low cost of ownership and a long life cycle. KARL SUSS MA 100 E is highly automated, providing a stable and reliable process, and is capable of both batch and split wafer processing. It comes with a user-friendly control system and is equipped with a vision system and alignment fiducial mark recognition and overlay correction. It is capable of exposure times as short as 2sec while accurately controlling dose independent of substrate size. The device also provides automated process management, with strict process control parameters that allow for uniform processing and consistent results across batches of wafers. The device runs on both a personal computer and a Linux server, and the user can easily customize their system configuration to include the desired performance parameters. The device is also compatible with Cassette to Cassette Modules, allowing for quick and easy loading and unloading without breaking the vacuum environment. MICROTEC MA 100E is a robust and reliable device that is ideal for production of 2D/3D microstructures and surface micromachining. It is easy to operate and maintain, providing long-term productivity and minimal downtime. It is also an economical solution for companies looking for a large working area at a reasonable cost.