Used KARL SUSS / MICROTEC MA 100E #9278360 for sale

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ID: 9278360
Mask aligner Missing / Damaged parts: UPS Mercury lamp controller 2011 vintage.
KARL SUSS / MICROTEC MA 100E is a mask aligner designed to facilitate contact alignment of high-precision photolithographic mask patterns onto semiconductor wafers. The equipment is extremely accurate, with the ability to register to a precision of three microns or less. Additionally, the mask aligner is capable of alignment at a 40 mm x 40 mm area and is precise enough that the edges of the mark are aligned within three percent accuracy. MICROTEC MA100E uses an optical system that comprises a motorized stage and a head via an XY positioner. The head/XY stages of KARL SUSS MA 100 E utilize powerful stepper motors and glass encoders that allow resolution of 5 nanometers in the XY plane. This allows for precise alignment of the target substrate with the patterned mask. MA 100 E is also capable of automated pattern scanning and has a Power Zoom optics unit that can zoom in from 4x to 16x. The machine can read up to 16 levels on a single die at high resolution in order to accurately align the details of the pattern. In addition to its precise alignment capabilities, MICROTEC MA 100E also offers a number of other features designed to make semiconductor fabrication more efficient. The mask aligner features a capacitive timing circuit that allows for precise timing of exposure. KARL SUSS MA 100E also offers an automatic shutter that can be activated to prevent the wafer from being exposed in the case of a malfunction. The mask aligner is also equipped with independent heaters and integrated pattern recognition software. Overall, KARL SUSS MA100E mask aligner is a powerful and precise tool for aligning photolithography masks with semiconductor substrates. The tool's stepper motors and glass encoders allow for precise alignment with a resolution of 5 nanometers in the XY plane. Moreover, MICROTEC MA 100 E includes several additional features such as a capacitive timing circuit, automatic shutter and independent heaters, making it a powerful and versatile tool for the semiconductor production industry.
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