Used KARL SUSS / MICROTEC MA 12 #293808783 for sale
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KARL SUSS / MICROTEC MA 12 is a mask aligner used in photolithography to transfer pattern structures with high resolution. It features an automated wafer handling equipment that is capable of supporting 25mm to 200mm wafers with a high vacuum chuck for accurate alignment. It is a programmable exposure tool that is easily operated with its intuitive graphical user interface. It has a wavelength tunability range that can capture a wide range of wavelengths from near infrared (NIR) up to ultraviolet (UV) light sources. MICROTEC MA 12 has an accurate positioning control with X, Y and Theta axes to ensure precise alignment of the pattern over the wafer. It features an advanced projection optics system with a numerical aperture of 0.28 and an optimized imaging unit to ensure optimal image quality. Additionally, it has an automatic selection of the best exposure for the scanned field and an integrated focus-tuning machine for adjustable depth of focus. The main advanced feature of KARL SUSS MA 12 is its dose-dependent partial exposure control. This feature enables sub-micron resolution of patterns and is used for high precision processing of multiple layers. It also offers programmable layer thickness setting and recipe-based autonomous use for a variety of applications. This feature ensures that fine and high-precision structures can be reliably defined for applications such as lithography and nano-imprinting. The other features include repeatable mask handling with its automated shuttle tool, telescopic shutter and programmable film holder, and an integrated vacuum asset. It also has two heating systems, one for the base temperature and the other for temperature regulation of the mask and wafer. In addition, the scanner alignment option in the software can be used to fine-tune the alignment accuracy. MA 12 is an enhanced mask aligner that can be used for various types of photolithographic processes. It has outstanding performance, high accuracy and repeatability, making it perfect for intricate and complex precision processes. The intuitive graphical user interface and several automated features make it easy to use and maintain. The flexibility and accuracy of KARL SUSS / MICROTEC MA 12 makes it a valuable tool for industrial, research, and academic applications.
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