Used KARL SUSS / MICROTEC MA-150 CC #9394343 for sale

ID: 9394343
Mask aligner Back Side Alignment (BSA).
KARL SUSS / MICROTEC MA-150 CC Mask Aligner is a versatile and reliable tool used in the fabrication of micro-electrical and mechanical components. It is capable of achieving critical alignment with sub-micron accuracy, making it suitable for the manufacture of components with microscopic features. MICROTEC MA150CC is a fully automated and user friendly equipment that delivers excellent and repeatable performance, providing great cost efficiency for the production of fine geometries at high yields. KARL SUSS MA 150CC uses a special stepper motor translation stage to accurately move the tiled masks in two orthogonal axes. This mechanism is driven by a high-speed positioning system that is based on a precision pulse encoder for very precise repeatable positioning control. The stage is further integrated with the control unit to ensure that masks can be loaded and unloaded quickly. The mask loading and unloading is facilitated by a one-push automaton located at the front of the machine. The loading force can be adjusted according to the mask size so that even very small and delicate alignment masks can be precisely placed. The mask aligner comes with a built in autofocus machine which allows for the highest level of accuracy to be reached when performing alignment. The optical tool uses a long depth of field objective lens and reverse tilt stages to obtain best focus regardless of the height variations present on the alignment marks of the masks. This feature allows for good depth of focus even when the masks have parts that require epi-illumination. Additionally, the autofocus feature can be manually overridden or disabled completely to provide maximum flexibility. Analog optical stepper shutter technology is used to expose the alignments marks on the mask to the photodiodes, making it possible for the asset to detect and measure the alignment marks on a standard 6um X 6um grid. This also allows for a fast exposure of the masks since no mechanical movements of the shutter are needed. The mask to focus distance is adjustable, allowing users to achieve different exposures and alignment accuracies depending on their needs. MA 150 CC also has a micro-positioner that is used to reduce rotational alignment marks or sliders found in the mask down to 25nm. This micro-positioner provides a great deal of control over how much exposure the masks will receive and can be used to fine-tune the positioning of the mask for more accurate alignments. MA-150CC mask aligner is a truly versatile tool that provides a great level of accuracy and control for aligning micro-scale components. It is user friendly and provides excellent cost efficiency for the production of fine geometries at high yields.
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