Used KARL SUSS / MICROTEC MA 150 M #9149625 for sale

KARL SUSS / MICROTEC MA 150 M
ID: 9149625
Wafer Size: 6"
Mask aligner, 6" Top side only No wafer cassettes One wafer at a time PC with solid state drive 15" Touchscreen 1000 Watt Lamp house UV400 Diffraction reducing optics 365nm / 405nm internal sensor SUSS CIC1000 Constant intensity power supply SUSS DVM 6 Dual video microscope 5x, 10X and 25X Objectives with turret SUSS AL300 Large gap alignment system Proximity, soft, hard and vacuum contact capable Pneumatic tubing throughout the machine Standard alignment chuck Standard maskholder.
KARL SUSS / MICROTEC MA 150 M is a precision mask aligner developed by MICROTEC used to manufacture microchips. It is capable of producing various features and alignments, including microvias, high resistivity busses (<200nm), and flip-chip assembly. MICROTEC MA 150M is designed to handle special process requirements with high-precision accuracy. The design includes a motor-driven working field, which allows for fine alignment and repeatable positioning, as well as a digital Read-Out which displays the exact position. The unit is also equipped with a modern optical projection equipment and sophisticated detection systems to ensure accuracy. This allows for precision alignment of the rear and/or front side of a mask prior to patterning the microchip. The system can accommodate automated masks up to 6" or 150mm with a tolerance accuracy of ±2μm KARL SUSS MA-150M is designed to make fabrication time shorter and easier. Additional process options include overlay and sub-pixel magnification alignments, and a programmable linear Z-axis to accommodate different material thicknesses. The built-in laser interferometer helps maintain the highest alignment accuracy and repeatability. The advanced design of MA-150M allows for fast and easy unit setup, utilizing the PC-based graphical control center. The integrated camera systems support accurate manual alignment, with options for Metrology and vision-assisted alignment for automated processes. The machine also has an improved robustness, with IP67-compliant protection for protection against dust and water splashing, as well as ESD protection. MA 150 M is ideal for both industrial and academic research applications. It is an excellent choice for creating everything from simple digital designs to more complex ones, such as 3D stacking devices. The unit is capable of handling a variety of materials, including copper, metals, eutectic, polyimide, and silicon. It is designed to handle production requirements with as much precision as necessary.
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