Used KARL SUSS / MICROTEC MA-150 #293775032 for sale
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ID: 293775032
Wafer Size: 6"
Vintage: 1993
Mask aligner, 6"
Cassette to cassette
Automatic wafer handling system
Lamp house: 1000 W (Hg) with CIC1000 Power supply
OSRAM 1000 with lamp
Pre-alignment
Semi-automatic front side alignment
Joystick controller
1993 vintage.
KARL SUSS / MICROTEC MA-150 is an advanced, high-precision mask aligner with a low cost of ownership, making it ideal for research and development labs, as well as universities and smaller production facilities. MICROTEC MA150 provides precise control of alignment with easy-to-use software, allowing for quick adjustment of critical parameters to compensate for inaccuracies in mask placement and/or substrate misalignment. KARL SUSS MA 150 utilizes pre-aligned masks and substrates to align them both quickly and accurately with no user intervention required. Accuracy of alignment is determined through two micrometer screws and the precise adjustment of a reticle stage, allowing the equipment to produce precise alignment and minimal registration errors. Additionally, KARL SUSS / MICROTEC MA 150 is capable of repeatable alignment over a wide range of substrates, including 4-inch and 6-inch wafers, glass, and thin films. The Mask Alignment System also features an air bearing stage which provides an exceptionally smooth, linear movement, resulting in increased accuracy and precise repeatability. An integrated microprocessor controller is used to accurately and repeatably control the movement of the reticle stage and to obtain the highest possible accuracy Drange results. MICROTEC MA-150 also features a high-resolution viewing unit with automatic image recognition and autofocus capability, enabling the mask alignment machine to quickly and precisely recognize features on masks and substrates. This tool also includes several software features that allow users to manually adjust the positional and angular adjustments made by the asset. This ensures that users obtain the best possible accuracy from the model. KARL SUSS / MICROTEC MA150 Mask Alignment Equipment can be delivered with a full complement of accessories, including integrated vacuum chucks, wafer bows, a heated substrates chuck, substrate spacers, as well as an overhead-mounted 175W Ellipsometer for advanced optical metrology measurement. This advanced mask alignment system is designed to meet the demanding needs of both research and production-level applications and can be integrated with a variety of additional unit components for even greater levels of performance.
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