Used KARL SUSS / MICROTEC MA-150 #9250392 for sale
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ID: 9250392
Wafer Size: 6"
Mask aligner, 6"
Wafer type: Silicon
Chuck: Wafers, 6" and mask, 7"
Cassette to cassette
No BSA.
KARL SUSS / MICROTEC MA-150 Mask Aligner is a powerful and versatile microfabrication equipment designed for a wide range of photolithography applications, ranging from nanometer precision patterning of semiconductor devices to the production of advanced liquid crystal displays and optical components. MICROTEC MA150 exploits stepper motor technologies to move a precision stepper motor-driven linear stage, capable of accurately positioning a substrate up to 6-inch square. This substrate is held in place by a vacuum system attached to the stage. The substrate is then aligned with a mask produced from scanned artwork and reticles, which is placed on the upper stage. At this point both the upper and lower stages are precisely aligned with a CCD-sensor unit and a finely adjustable mirror. KARL SUSS MA 150 offers a wavelength range of 365 to 405nm, allowing for exposure to highly sensitive photoresists. Furthermore, it features excellent uniformity of exposure across the entire substrate. To ensure consistent and reliable performance, a high-level of mainenance is maintained on the device, and automatic self-diagnostics are continuously carried out. KARL SUSS / MICROTEC MA 150 Mask Aligner also features a number of advanced features, such as: a repeat exposure and programming machine, allowing users to produce a range of repetitive patterns; automatic operation, with a user-friendly display interface; and auto-recalibration using the CCD-sensor tool. In addition, KARL SUSS MA150 includes an automatic blanket cleaning and edge sensor for recognizing the substrate. MA150 Mask Aligner is built with quality components and is considered reliable and accurate. Engineers, university research centers and device manufacturers trust it for providing consistent and reliable performance. KARL SUSS / MICROTEC MA150 is an invaluable asset to those companies looking for an effective, quality mask aligner asset with minimal downtime.
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