Used KARL SUSS / MICROTEC MA-150 #9389834 for sale

KARL SUSS / MICROTEC MA-150 is a professional-grade, automated mask aligner, designed to perform precise photolithography operations in the very fine, complex fab space of integrated circuits. This aligner is robust, precise and modular, allowing for customization to a variety of user needs. MICROTEC MA150 is a fully automated photolithography equipment, with a secure and reliable vacuum-sealed wobble-free chamber that provides precise, repeatable alignment and uniform exposure of the wafer from 1-99 wafer masks. The system also features a low-force mechanical subsystem that enables precise operation even in vibration-prone environments. KARL SUSS MA 150 has a 24-bit nanometer stage resolution and a built-in intelligent process control unit, which allows for submicron alignment accuracy as well as steady, precise exposure control with no banding or other image imperfections. Additionally, the unit features a sensitive optical module that enables measurement of a small area with high repeatability of focal length, allowing precise positioning of masks and wafers. KARL SUSS / MICROTEC MA150 also features a removable stage which allows the user to easily adapt the machine according to their preferred specifications. The unit allows for a range of techniques such as wet etch, photoresist development and curing, vacuum sputtering, and thermal treatment. The tool can also be used to process thick wafers using batch chamber technology. The asset is capable of providing films up to a thickness of 1.5 μm and masks up to 1.7 nm line widths. Additionally, the model allows for on-the-fly reticles, giving users freedom to make design changes during the photolithography process. MA150 also supports a comprehensive library of recipes for the programming of photolithography processes. The equipment also offers flexible options for automated calibration with an integrated calibration monitor, ensuring smooth and accurate processing. Furthermore, MA 150 is compatible with other systems in MICROTEC product line, allowing for one-click transfer of recipes from one system to another, providing an efficient and flexible production solution.