Used KARL SUSS / MICROTEC MA 150c #9379206 for sale

KARL SUSS / MICROTEC MA 150c is a state-of-the-art mask aligner. It is a highly advanced machine capable of performing lithography, photoresist development, and etching for a variety of microelectronic device fabrication processes. MICROTEC MA 150c features a two-chamber design, with separate clean-room compatible process chambers for manual, as well as automated, exposure and post-exposure applications. KARL SUSS MA 150 C has a rigid forged aluminum structure, providing a highly rigid support over its full working height of 1.5m. This structure is also coated with a uniform black epoxy for heat and light absorption. Its well-cushioned Y-Z and Θ-Φ axes provide a high degree of precision alignment, while maintaining high capacity of up to 20kg objects. The full working area is capable of accommodating flat surfaces up to 203mm x 203mm in size. KARL SUSS / MICROTEC MA 150 C features an integrated laser alignment system consisting of two in-cabinet laser sources and a scanning mirror, allowing for a high degree of accuracy in photomask positioning. For convenience, it also includes a semi-automatic 4-track wafer and exposure handler, that allows for the placement and exchange of photomasks and wafer frames within seconds. In addition to lithography, KARL SUSS MA 150c is also equipped with a fully automated developing station and a post-exposure slot-die coater. The developing station and slot-die coater allow for the precise deposition of photoresist of different types. After post-exposure the mask is automatically transferred back into the aligner to allow for the etch process, if applicable. MA 150c is designed for high throughput, allowing for an average φ over φ mask-alignment accuracy of 0.2 microns. While full automation is provided, it also has an easy-to-use user interface, which provides convenient control and monitoring of the machine's processes. MA 150 C is temperature-controlled through an integrated Peltier module from 15 to 35°C, and is designed to maintain a constant temperature, ensuring consistent results. Overall, MICROTEC MA 150 C Mask Aligner is a state-of-the-art machine that offers highly accurate and precise mask alignment, combined with full automation and a user-friendly control interface, making it an ideal system for microelectronic device fabrication.