Used KARL SUSS / MICROTEC MA 200 #9394467 for sale

ID: 9394467
Vintage: 2008
Mask aligner 2008 vintage.
KARL SUSS / MICROTEC MA 200 is a mask aligner that is used to create photolithographic patterns on substrate surfaces, often on semiconductor wafers or thin film devices. The instrument utilizes a mask-on-wafer approach, which aligns the mask to the wafer in a highly precise manner. MICROTEC MA200 offers full-field alignment that ensures accurate and repeatable patterning on the substrate. KARL SUSS MA-200 features an XY theta stage and a 6-axis kinematic mask holder that is designed to ensure exact and repeatable positioning and alignment of the mask with the wafer. The machine's driving equipment features high-speed servos and high-precision linear bearings which provide quick and repeatable step-and-repeat alignment and exposure. MA-200 also features a sophisticated lighting system which utilizes LEDs to create exposure light of various wavelengths and for precise exposure control. The optics package of KARL SUSS / MICROTEC MA200 features interchangeable objectives, which allow for efficient scaling of patterns. The exposure unit utilizes a pupil relay optics between the mask and the wafer to ensure accurate imaging, while the viewing optics package offers stepper magnification and real time inspection. The machine is designed for flexibility and can accept a wide range of masks and substrates with a wide range of layout types. KARL SUSS MA200 has state-of-the-art control software designed to provide flexible, user-friendly operation with job programming capabilities and support for multiple substrates. The software also allows for process optimization and parameter development. The machine's temperature control machine maintains a constant ambient temperature with the ability to heat or cool the wafer before, during, and after exposure. In addition, MA 200 is able to handle substrates up to 8-inch in diameter and is capable of an exposure area of up to 5.5-inches. The machine also has an advanced wafer handling tool that features an automated wet processing asset to clean and preserve the photoresist prior to exposure. KARL SUSS MA 200 is built for easy maintenance with its modular design and a comprehensive set of self-monitoring functionality.
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