Used KARL SUSS / MICROTEC MA 24 #9382957 for sale

KARL SUSS / MICROTEC MA 24
ID: 9382957
Vintage: 1993
Mask aligner 1993 vintage.
KARL SUSS / MICROTEC MA 24 is an advanced mask aligner used in semiconductor fabrication processes. This tool can be used to imprint lithographic patterns using EBRs (Electrically Blanked Resistors) and laser light onto a mask and/or on the wafer. The machine has a high precision two-axis coordinate table of which one axis is used to rotate the mask, along with an aluminum vacuum chuck. The table can reach speeds up to 400 rpm and repeatability up to 5 microns. It also has a high performance laser beam splitter that allows for more accuracy in the alignment process, and it is capable of aligning step sizes as small as 1.5 microns. The alignment process of MICROTEC MA 24 is highly automated. The laser is used to detect the position of the mask and the alignment accuracies are obtained with two optical sensors. This results in a high accuracy of the alignment of the mask and the wafer. Laser mark detection is also used for aligning multiple layers in a process. As the machine is a highly precise instrument, it requires less human supervision than other similar aligners, making it much more efficient in terms of time and money. Furthermore, it doesn't produce any ozone, which makes it safe to use. KARL SUSS MA 24 has a host computer that can be linked to any lithography operation. It also offers users a comprehensive data report of the alignments, so that they can better control their operations. In conclusion, MA 24 is an advanced mask aligner that is highly precise and efficient. It offers a host of features including high accuracy, minimal human supervision, safe operation and a comprehensive data report. It is a great choice for semiconductor fabrications such as those used in the electronics industry.
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