Used KARL SUSS / MICROTEC MA 4/6 #9249041 for sale
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KARL SUSS / MICROTEC MA 4/6 is a mask aligner used to align lithography masks with photoresist-covered wafers in order to create patterns on the wafer. MICROTEC MA 4/6 is specifically designed to make high-volume manufacturing of integrated circuits (ICs) reliable, precise, and reproducible. The equipment utilizes high-precision and automated alignment techniques to accurately manipulate and position masks for patterning of ICs. KARL SUSS MA 4 / 6 mask aligner has five main components: a wafer table, a mask table, a pair of optical encoders, a vision and inspection system, and a control unit. The wafer table is designed to hold the wafer and is equipped with pneumatically driven vacuum cups to secure the wafer and allow it to be maneuvered in the X, Y and Z axes. The mask table is designed to hold the mask and contains an integrated, automated mask loader. The optical encoders help to accurately measure the movement and alignment of the wafer and mask to each other. The vision and inspection unit ensures that the integrity of the mask and wafer is maintained and that the patterning is performed properly. Finally, the control unit provides the hardware and software to instruct the wafer and mask tables on exact positioning. MA 4 / 6 mask aligner features a calibrated alignment accuracy of up to 10 micrometers (µm), making it suitable for nanometer-scale precision. Furthermore, the alignment accuracy is adjusted with a three-point calibration machine for optimal alignment. This three-point calibration tool utilizes three fiducial marks, which are permanent marks on the wafer used to reference the mask, to provide independent alignment in the X and Y axes. In addition, the asset features an integrated wafer inspection model, which inspects the wafers before and after exposure. This inspection is show on the control unit's screen, giving access to a wide variety of parameters to check for reproducible accuracy. Additionally, KARL SUSS MA 4/6 mask aligner features an intuitive, icon-driven intuitive user interface, which simplifies user operation and setup even for first-time users. There is even a computer-aided design (CAD) interface, which is used to transfer patterns from the IC layout to the wafer. This program is also customizable and programmable, allowing for tailored operation according to user specifications. Other features of MA 4/6 mask aligner include advanced image processing, low running costs, and a low floor-space requirement. This mask aligner is well-suited to both small and large production runs and is designed to make high-volume production of ICs accurate, reliable and reproducible. With its intuitive user interface, programmed features, and sophisticated alignment accuracy, KARL SUSS / MICROTEC MA 4 / 6 mask aligner may be used reliably and even by first-time users.
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