Used KARL SUSS / MICROTEC MA 45 #9221606 for sale
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KARL SUSS / MICROTEC MA 45 is a sophisticated mask aligner that offers high precision alignment between a pattern arrangement on a mask and surface features on a substrate. It is a contact aligner, using a combination of mechanical and optical sensors to ensure a precise fit between the pattern and the substrate. MICROTEC MA 45 utilizes automated calibrations to simplify the job selection and alignment process, significantly increasing throughput and reducing setup time. KARL SUSS MA-45 consists of a machine housing and a camera assembly, as well as a vacuum chuck-mounted wafer stage. The equipment is configured with four alignment vision systems - two for coarse alignment and two for fine alignment. A single-beam scanning unit is used to capture the image data from the pattern and wafer surfaces. This data is processed in software to generate parameters for alignment, enabling the system to achieve registration accuracies of up to 2 microns. KARL SUSS MA 45 is designed with multiple exposure capabilities to provide comprehensive access and coverage of the wafer substrate. It is equipped with several different types of projection optics, for use with different patterns and features. It can also be equipped with multiple source holders, allowing a variety of mask formats to be handled. The unit features an ergonomic design, enabling operators to manage all operations and verify process data from a single console. It is controlled by a Linux-based operating machine and can be interfaced with SUSS MICROTEC software tools, allowing engineers to store jobs, monitor exposure results and adjust parameters as needed. In addition, KARL SUSS / MICROTEC MA-45 can be integrated with a wide range of other equipment, and is compatible with automated material and resource handling systems. This makes it possible for users to create complete production systems for efficient automation, as well as cost-effective and reliable production operations.
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