Used KARL SUSS / MICROTEC MA 56 #293740285 for sale

KARL SUSS / MICROTEC MA 56 is a state of art mask aligner tool that is used within the semiconductor fabrication process. It consists of three primary components: the alignment equipment, the actuator, and the micro-manipulator system. The alignment unit uses dual optical tele-readers to detect the alignment marks on both the mask and wafer. It then produces a reference offset between the two that is based on the accuracy of the optical tele-readers. The actuator is used to move the mask and wafer into their relative positions and hold them there. The micro-manipulator machine consists of manipulators which move the mask and wafer into a frame of reference and hold them there. The actual feature size is determined by the mask used for printing on the wafer, and this feature size also determines the accuracy expected from the alignment tool. With this particular tool, the alignment accuracy is quoted as 1 micron or smaller, making it suitable for a wide variety of devices ranging from high power RF, analog and digital devices. The Actuator has a repeatability that is quoted as 1.5 microns, making it suitable for devices with line widths ranging from 5 microns to 25 microns. The Mask Aligner also includes an illumination asset with a 7x spectral flood lamp that ensures proper exposure of the photoresist layer on the wafer. The light is specifically tailored to the mask being used and has a homogenous tightly beam intensity. This tight light beam is what allows the tool to achieve sub 0.5 micron accuracy with the alignment model. MICROTEC MA56 also includes wafer cleaning and drying capabilities, including metrology capability. It has full cassette-to-cassette vacuum operation and features a selectable Z axis wipe. Additionally, the tool is equipped with automated test capabilities, environmental control up to 40C, temperature and humidity control, light damage protection and hot/cold chuck control. Overall, KARL SUSS MA-56 is a highly accurate and reliable mask aligner tool. Its state of the art components ensure that it can handle all sorts of applications ranging from high power RF devices to digital designs. Additionally, the ability to clean and dry wafers, as well as an automated test capability make KARL SUSS / MICROTEC MA-56 an essential tool for advanced semiconductor fabrication processes.