Used KARL SUSS / MICROTEC MA 56 #293818127 for sale
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ID: 293818127
Mask aligner
Substrate size: 2.5" × 2.5"
UV400 Optical system
Lamp, 500 W
Operation modes: Soft contact and hard contact
LPS 1000/CIC 500 Power supply unit
Сontrol panel/console
Manual.
KARL SUSS / MICROTEC MA 56 is an automated mask aligner used in the production of microelectromecanical systems (MEMS). It is a mask projection system that uses integrated optics, automated wafer-staging, and multi-zone heating and cooling. It provides a precise, reliable way of outlining and transferring patterns onto a silicon substrate. The system is equipped with a digital mask pattern generator and a high-speed, high-precision objective lens that is capable of producing patterns with a minimum line width of 90 nm and minimum line spacing of 180 nm. MICROTEC MA56 is capable of producing a wide range of patterns with a resolution of up to 0.5 µm. It also features a 3𝛍 X,Y and θΩ wafer stage for precisely positioning and orienting wafer's during alignment. KARL SUSS MA-56 also features a high-quality light source that provides greater brightness and uniformity than traditional arc lamp sources. This ensures precise alignment and pattern transfer onto a substrate. The optics design of KARL SUSS / MICROTEC MA-56 includes several high numerical aperture objectives and allows for semi-automatic focusing and refocusing. All patterns are projected onto a substrate through a stable, vibration-compensated optical box. MICROTEC MA 56 provides a wide range of features designed for automated, high-precision alignment. It features automated wafer loading, multi-zone heating and cooling, digital control of alignment accuracy, and full access to the process parameters. It also features two-point registration and local registration for complex wafer geometries. MA-56 is ideal for high-precision, large-scale fabrication of MEM systems. It provides a precise, repeatable way of aligning and transferring patterns onto a substrate, while providing precise and precise registration. The comprehensive software suite provides an easy-to-use and flexible mechanism for controlling all parameters, ensuring reliable alignment and repeatability. MA56 is a high-quality, cost-efficient way of producing highly precise masks with a precise, consistent result.
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