Used KARL SUSS / MICROTEC MA 56 #9116712 for sale
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ID: 9116712
Wafer Size: 4"
Top sided mask aligner, 4"
(4) Coll wafers
Automatic wafer transfer
Set up for deep UV.
KARL SUSS / MICROTEC MA 56 is a mask aligner manufactured by SUSS MICROTEC. It is a practical and versatile solution for accurate alignment of large or small sized substrates for microelectronics production applications. MICROTEC MA56 features a proprietary Active Stabilization technology that delivers results with accuracy up to 4 μm (±2μm) independently of environmental conditions. Furthermore, the auto-aligning optical-mechanical systems ensures high throughput performance with a full-wafer alignment process in less than 5 minutes. The user interface of KARL SUSS MA-56 makes use of an intuitive, Windows-based graphical user interface (GUI), which offers users a user-friendly way of controlling the mask aligner's operation. The advanced control equipment of KARL SUSS / MICROTEC MA-56 also allows data to be transferred and stored for further analysis and interpretation. MA-56 integrates an automated loader for passage of masks from the cassette to the exposure area through a robotic arm. The mask aligner can accommodate both manual wafer alignment models, such as the standard manual wafer leveling system with four adjustable screws, as well as the auto-alignment unit, with its innovative electromechanical cassette-leveling machine. MA56 is equipped with a long-life mercury lamp, a high precision optical imaging tool and the advanced modulation transfer function (MTF) that allow a higher throughput at low dose levels. The built-in software of the aligner is suitable for a variety of applications and provides the user with the ability to optimize the treatment of lithographic patterns to achieve high yields. MA 56 can make use of different substrate sizes of up to 200 cm², and offers a high degree of accuracy as well as the ability to compensate for environmental factors, such as temperature or humidity. The mask aligner also supports a variety of languages which makes it suitable for the worldwide market. Overall, MICROTEC MA 56 is a reliable mask aligner that delivers accurate results with unmatched precision in a short-time period. It is a versatile and practical solution that is profitable to many microelectronics establishments.
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