Used KARL SUSS / MICROTEC MA 6 #131530 for sale
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ID: 131530
Wafer Size: 6"
Topside and IR mask aligner, 6"
With backside IR
Chuck, 6"
Split field optics:
Torret type
UV 400 Optics
Lamp: 500W Mercury short-arc lamp
Power supply: CIC 1000.
KARL SUSS / MICROTEC MA 6 is a mask aligner designed for use in precision alignment and photolithography of a variety of materials, including metals, glass, ceramics, and plastics. MICROTEC MA6 is ideal for use in electrode deposition, photoresist processing, and BioMEMS micromachining applications. KARL SUSS MA-6 features an extremely precise, automated image alignment equipment that ensures accurate and repeatable photo lithography mask alignments for virtually any photoresist or polymer substrate. The mask aligner also features a highly sensitive optical registration system that can accurately measure the offset between the masking structure and the substrate. This unit is able to accurately align the mask to within 0.5 micrometer. MICROTEC MA 6 also offers a wide range of advanced photoresist processing techniques. This includes variable angle parallelism, variable direction parallelism, and variable focus alignment. The mask aligner also features an automated sensitivity control machine that offers linear and non-linear resistivity control over a wide range of resistivities. The integrated software gives the user the ability to monitor and control process times, temperatures, and other parameters during a photolithography cycle. KARL SUSS MA 6 also offers superior temperature uniformity through an advanced heat-sink design. The heat-sink is designed to circulate heated air evenly across the substrate surface. This helps to ensure optimal efficiency and precision during photolithography. KARL SUSS / MICROTEC MA6 also contains integrated safety features that help ensure the safety of personnel, equipment, and environment. These features include a light curtain, safety interlocks, air filtration and vacuum isolation valves, and a protective shield. MICROTEC MA-6 is a highly versatile tool that can be used to precisely align and lithography almost any material. The highly accurate image alignment tool, advanced photoresist processing techniques, superior temperature uniformity and range of safety features make KARL SUSS MA6 an ideal choice for almost any application.
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