Used KARL SUSS / MICROTEC MA 6 #293592970 for sale
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ID: 293592970
Wafer Size: 6"
Mask aligner, 6"
Gen 1
Resolution: 1 Micron
Split field microscope with (6) objectives
Option: IR, 3"
Mask holder, 7x7"
Power supply: 1000 W.
KARL SUSS / MICROTEC MA 6 is an advanced mask aligner designed for high-precision alignment and registration. It is equipped with an automated laser equipment for high-accuracy alignment of up to six substrates in one cycle. The precision of the alignment and registration is 0.5µm in both x,y directions and one µm in z direction. The system's accuracy is further aided by the presence of a highly sensitive wafer-edge recognition feature. The alignment and registration process is carried out by the sequential firing of five separate laser beams onto a series of markers on the substrate. Each marker is monitored and corrected to meet the required tolerance so that it is accurately aligned and bonded to the substrate of choice. MICROTEC MA6 includes a wafer stage robot unit to facilitate load/unload of substrates and an integrated thermal machine to keep them in their ideal temperature range. The mask aligner also features automatic reticle exchange and an integrated control center providing visual interface and real time monitoring of process. Its advanced design allows for simple and easy changeover of parameters between recipes thus allowing for extended flexibility in the alignment process. KARL SUSS MA-6 also utilizes a vision tool to scan reticles for defects which ensures defect-free alignment in each substrate. MICROTEC MA 6 is a highly reliable mask aligner that can be used in a range of industries such as electronics, optoelectronics, photonics and microelectromechanical systems (MEMS). The asset itself is dust-protected and can be used in a range of production environments, from high-volume to large cluster configurations. It offers excellent stability and reliability for its class, making it ideal for applications requiring high accuracy and repeatability. MA6 is an ideal tool for aligning micro-structured components in precision manufacturing processes as it can perform alignment with high-quality, high-precision and repeatable results. In conclusion, KARL SUSS / MICROTEC MA-6 is an advanced aligner designed for high-precision applications. With its highly automated and reliable model, it can provide accurate alignment and registration with excellent stability for the class. The equipment is dust-protected and can work in a range of production environments and configurations, making it a great choice for precision manufacturing processes.
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