Used KARL SUSS / MICROTEC MA 6 #293623425 for sale

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ID: 293623425
Mask aligner.
KARL SUSS / MICROTEC MA 6 is a high precision, fully automated mask aligner designed for the production of advanced semiconductor devices. It is capable of aligning and exposing devices on substrate wafers up to 200 mm in size. This microprocessing machine utilizes sophisticated software and optical and motor controls to accurately place features and alignment marks onto the substrate. The optical system consists of a telecentric lens, alignment beams, and stage motion. The motor control can vary the X and Y axis motion and incorporates both step motion and continuous motion. The machine's alignment capabilities are further enhanced by the use of optical beam splitting technology, allowing the alignment beams to be split into multiple spots. This makes it possible to align the alignment marks and the features in multiple spots at the same time. The optical subsystem is also very accurate, with alignment accuracy of up to 1µm. MICROTEC MA6 provides a full range of resist exposure techniques, such as optical, e-beam, and x-ray lithography. It can also be used for alignment of solder balls and circuit components. The machine's auto-exposure and alignment functions ensure that the finest detail is still printed accurately, even with small substrates. KARL SUSS MA-6 also includes a range of safety features, such as enclosed surfaces and a user-friendly operator interface. Additionally, the machine is equipped with a software package designed to control and monitor workpiece parameters. The software enables repeatable process recipes to be easily entered, logged and stored. Finally, MA6 is designed to be highly reliable and has a successful track record in production lines around the world. Its rugged design and superior performance make it the perfect choice for high-precision, high-volume production requirements.
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