Used KARL SUSS / MICROTEC MA 6 #9230018 for sale

KARL SUSS / MICROTEC MA 6 is a microelectronics mask aligner designed for wafer-level photolithography. It is a fully automated instrument that operates on the principle of projection imaging. The device aligns and exposes the optical image of a photomask to a coated or uncoated substrate to manufacture photolithography patterns on the substrate. MICROTEC MA6 includes a mechanically controlled mask stage for handling and aligning the photomask. It also includes a wafer stage that automatically moves the substrate in the x, y, and z directions. KARL SUSS MA-6 accommodates substrates up to 150 mm in diameter with both spin and linear contact exposures. The mask stage has adjustable x, y and z alignment for accurate alignment of the mask and substrate. KARL SUSS MA 6 has a maximum resolution of 0.5um, typically used for semiconductor technologies, and a minimum feature size of 1.0um, used for display and sensor applications. It has an exposure energy range of 0.15 mJ to 3.2 mJ with an accuracy of 0.15 mJ. A liquid nitrogen-cooled beam steering system enables accurate alignment and exposure. The instrument is designed to provide low-cost, sub-half-micron imaging. MA6 also features an optional I-line machine which allows marking of inner layers. Built-in flippers ensure thorough cleaning of all optical components. The included multi-layer unit allows for production of multiple layers with only one exposure. The programmable, dynamic alignment allows for the accurate and reproducible placement of alignment marks. The software aligns the desired mask with the substrate to ensure proper alignment. MA 6 also includes an integrated etching for dry-etching of photoresist and a wet etching option for removal of undercut photoresists. It has a high level of repeatability, with an accuracy of 0.05 percent. It also has integrated cooling of the wafer stage to extend its lifetime and allows for high-precision imaging. The instrument provides an easy-to-use, fully automated user interface with its GUI. It is designed to be compliant with all major safety and emission standards. These features make KARL SUSS / MICROTEC MA-6 ideal for prototyping, small- and medium-volume production, and research and development.