Used KARL SUSS / MICROTEC MA 6 #9257127 for sale

ID: 9257127
Mask aligner Backside chuck, 3" (BSA).
MICROTEC/Micromask KARL SUSS / MICROTEC MA 6 is a state-of-the-art, precision mask aligner for exposure of photomasks and various substrates during precision lithography process steps. It is ideal for use in laboratory and industrial applications for the fabrication of integrated circuit components, such as transistors, resistors, and capacitors. MICROTEC MA6 operates using a finely tuned, automated system that ensures accuracy and versatility in the photolithographic exposure process. It has a 6-inch square programmable exposure area that is suitable for medium- to large- scale integrated circuit (IC) design and fabrication. It is equipped with a UV lamp whose wavelength range of 193 to 248 nm further allows exposure onto a wide range of materials. The design of KARL SUSS MA-6 allows for precise and repeatable alignment of the mask over the device or substrate being exposed. This precision is made possible by several innovative mechanisms, such as micro and macro-scope alignment, auto-focus systems, and integrated vision systems. These mechanisms ensure that the desired design can be accurately aligned onto the substrate during the exposure process and that the desired exposure results are consistently achieved. MA6 also offers several different exposure options, such as lift-off and two-photon direct exposure. The two-photon direct exposure method is perfect for higher resolution patterns as it allows for large photo masks and/or small substrates to be exposed without the need for a contact print. KARL SUSS / MICROTEC MA-6 is also capable of deep ultraviolet (DUV) and ultra-high energy (UHE) irradiation. Moreover, MICROTEC MA 6 is compatible with photoresists of varying chemistry and thicknesses, giving the user total flexibility when it comes to the precise exposure requirements for their particular device or substrate. In sum, MA-6 is an advanced, reliable and user-friendly mask aligner tool. Its precise alignment and exposure capabilities, as well as its sophisticated, automated systems, make it an ideal tool for all of your precision lithography needs.
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