Used KARL SUSS / MICROTEC MA 6 #9281940 for sale
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KARL SUSS / MICROTEC MA 6 is a mask aligner used for the fabrication and alignment of photomasks in microelectronics and semiconductor production. The aligner is a fully automated machine used to align and transfer features on photomasks to a substrate or wafer while ensuring near perfect alignment. The advanced machine features laser interferometer-based metrology, which allows for incredible accuracy during the transfer and alignment process. MICROTEC MA6 is composed of several components: a high-precision motorized stage, a vacuum vacuum chuck, a metrology camera and a projection equipment. The motorized stage on KARL SUSS MA-6 is capable of precision movements of 0.5 microns and features an anti-vibration suspension system, while the vacuum chuck secures the wafer by means of suction. The metrology camera is used to measure any misalignment between the mask and the wafer, while the projection unit is used to transfer patterns from the mask to the wafer. MA 6 is capable of fabricating any photomask with an accuracy of 300 nanometers. Furthermore, its sophisticated pattern recognition technology allows the machine to easily identify and replicate even the most complex patterns. This technology, coupled with KARL SUSS / MICROTEC MA6's advanced projection tool, results in incredibly accurate alignment and transfer of patterns between the mask and wafer up to ± 0.1 micron. KARL SUSS MA6 also features automatic reference point recognition, ensuring perfect alignment in even the most challenging cases. Additionally, it has the capability to store up to 1000 recipes, enabling rapid setup and operation of multiple process jobs. KARL SUSS MA 6 also has an optional micro-manipulator for high-precision alignment and manipulation of small micro-structures. MA-6 is an advanced tool that is widely used in the semiconductor industry for the production of high-quality integrated circuits. Due to its incredible accuracy and sophisticated pattern recognition, KARL SUSS / MICROTEC MA-6 is an essential tool that has become an industry standard for photomask fabrication.
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