Used KARL SUSS / MICROTEC MA 8 / BA 8 #293609999 for sale

ID: 293609999
Mask aligner.
MICROTEC MA 8 and BA 8 are mask aligners, advanced lithographic tools used for the production of optical masks used in the semiconductor industry. These mask aligners feature a computer-controlled positioning equipment which is able to precisely align and expose photosensitive film placed on a chrome bar inside the machine. The MA 8 and BA 8 provide fast and accurate alignment, with extremely precise positioning accuracy of up to 50 nm and repeatability of up to 800 nm. The alignment system allows for the registration of overlays with zero-shift registration when the coordinates of the overlays are known. Each mask aligner is outfitted with its own 150 W UV-halogen lamp and other components necessary for exposure, including a quartz illumination optical unit and collimators featuring minimal distortion and an even illumination field. Exposure control is handled through an automatic shutter machine and timed exposure settings. Safety is integrated into the systems, featuring protection from electric shocks and dust contamination with a safety shield on the lamp and a camera tool used to monitor the material subjected to exposure. Other features include a user-friendly touchscreen interface with a graphical user interface for easy navigation of features. The MA 8 model supports a working plane of up to 200 x 200 mm and up to 6.5 levels of masking, while the BA 8 supports up to 400 x 400 mm and up to 24 levels of masking. Both systems have real-time calibration electronics and virtual flat-field correction software, allowing for improved accuracy and control. The design of the systems also ensures a low amount of vibration during operation and quiet operation through the use of a low-noise positioning asset. These mask aligners are designed to be easy to use, while offering reliability and precision through professional-grade components. The MA 8 and BA 8 offer robust lithography options for producing optical masks used in the semiconductor industry.
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