Used KARL SUSS / MICROTEC MA 6 / BA 6 #9163150 for sale
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ID: 9163150
Wafer Size: 6"
Vintage: 2000
Mask aligner, 6"
Configured for 5”
Currently stored in clean room
2000 vintage.
KARL SUSS / MICROTEC MA 6 / BA 6 Mask Aligner is an advanced mask aligner for devices ranging from small mid-range to high-end semiconductor technology. It is designed to print, align, and transfer patterns of masks onto a substrate with exceptional accuracy. MICROTEC MA6/BA6 machine uses a highly precise Z-axis motion and a bright red diode laser to align mask patterns with the device. It is capable of placing and aligning very small patterns with accuracy up to 55 μm. KARL SUSS MA6 / BA6 Mask Aligner has an extremely robust and reliable design for precision operation. This machine is constructed with a solid BOSCH-style deck and has jig positions for up to 6 different masks. Its advanced linear motor-driven X-axis, combined with a 4-axis vision system and a rotary stage assist, guarantees reliable pattern placement and alignment. In addition, the machine uses three cameras to check the mask-to-substrate alignment. KARL SUSS MA 6 BA 6 Mask Aligner has a large optimized printing window. It is capable of printing very small patterns up to 4mm in size with an incredibly quick 10 μm repeatability. It offers both manual and automatic printing mode, enabling the user to switch between these functions seamlessly. Additionally, this mask aligner has an integrated LED-based backlight system for enhanced viewing results, and it can reach temperatures up to 150 degree Celsius. In summary, KARL SUSS MA-6/BA-6 Mask Aligner is a highly reliable and precise tool for aligning and transferring patterns. It has a robust design, featuring an X-axis linear motor-drive, and several jig positions for various masks. Moreover, it offers manual and automatic printing mode with temperature up to 150 degree Celsius, and a backlight system for improved viewing of results. It is an ideal solution for a multitude of industrial applications, and is capable of printing and aligning small patterns up to 4mm in size with a 10 µm repeatability.
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