Used KARL SUSS / MICROTEC Mask Track Pro #293634693 for sale
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ID: 293634693
Vintage: 2007
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KARL SUSS / MICROTEC Mask Track Pro is a state-of-the-art mask aligner used for the fabrication of fine geometries in photolithography applications. Utilizing a precision wafer stage for extremely accurate control, MICROTEC Mask Track Pro provides highly precise mask alignment and a high resolution stage scanning capability. The aligner is designed specifically for applications requiring optimal alignment accuracy and reliability. KARL SUSS Mask Track Pro's fully automated alignment equipment is based on a state-of-the-art white light interferometer system. The interferometer projects a sinusoidal fringe pattern onto the photomask, which induces a signal in direct correlation with the precise distance of the object from the sensor. This signal is measured by an advanced CCD camera, allowing for precise mask registration. The high-speed sensors, along with precise motors, enable extremely fast and precise alignment of the mask to the wafer. Moreover, Mask Track Pro is equipped with a 6-axis optimized sensitivity feature which ensures more accurate and stable alignment. Additionally, KARL SUSS / MICROTEC Mask Track Pro is equipped with a high-resolution stage scanning repositioning unit capable of creating patterns with a resolution of up to 2 microns. This feature allows for extremely precise control of the features on the photomask. The machine is capable of positioning the stage with a step resolution of 200 nanometers. Furthermore, MICROTEC Mask Track Pro offers an automated wafer loading function that allows for accurate wafer alignment. KARL SUSS Mask Track Pro is a powerful mask aligner that accurately aligns photomasks with high-resolution features and fine geometries. The advanced interferometer tool enables precise setting of the correct region of a photomask onto the wafer and high-speed motors allow for fast and accurate tracking. The high-resolution stage scanning repositioning asset guarantees accurate feature creation and the automated wafer loading model ensures precise alignment. With its advanced design and robust performance, Mask Track Pro is a versatile and reliable choice for demanding photolithography applications.
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