Used KARL SUSS / MICROTEC MJB-3 #293590392 for sale

KARL SUSS / MICROTEC MJB-3 is a dedicated Mask Aligner specifically designed for production level Photolithography. In Photolithography, a fine pattern is transferred from a photomask to a silicon wafer by exposing it to ultraviolet light, which offers an extremely accuracy for the placement of devices on a wafer. MICROTEC MJB3 Mask Aligner offers a very high accuracy alignment with a positioning accuracy of ± 0.3μm and repeatability of ± 0.2μm. KARL SUSS MJB 3 aligner offers two independent alignment systems. First is a microscope alignment equipment, which consists of a high resolution digital CCD Camera (1280 x 1024, 5.5μm pitch) with a magnification of 4x - 64x and an alignment accuracy of 0.06µm per pixel. The second alignment system is a stepper unit for coarse alignment, which consists of a high resolution stage (1,800 x 1,800 pitch) with a positioning accuracy of 0.4µm for coarse alignment. KARL SUSS MJB-3 aligner is equipped with a highly innovative imaging machine, offering an unparalleled field of view. It allows for large area exposure, with a field of view of up to 200 mm at 26.6µm per pixel resolution. This is achieved by the combined use of a long working distance 50mm 2.5X zoom-objective and two digital shift lenses. The imaging tool is also equipped with a bright field imaging asset enabling extended dynamic working range and sensitivity. MJB3 aligner offers a wide range of advanced exposure parameters, such as a maximum exposure field size of 8" x 8", exposure dose range of 0.1 - 250 mJ/cm2, and an exposure accuracy of ± 2%. It also offers a variety of exposure types, such as single-beam, multi-beam and programmable beam exposures, for the maximum flexibility. Finally, MICROTEC MJB 3 mask aligner is highly integrated to provide the highest performance, controllable throughput and unsurpassed accuracy. It offers a heated vacuum chuck for performance and is able to process up to five wafers in a single run, ensuring a high throughput production environment. Moreover, KARL SUSS MJB3 is compatible with many software packages and can be used as stand-alone model or as part of a fully automated production line.