Used KARL SUSS / MICROTEC MJB-3 #293766399 for sale

KARL SUSS / MICROTEC MJB-3 is a high-precision mask aligner used in the photolithography process for the fabrication of microelectronic and optoelectronic devices. MICROTEC MJB3 provides a high degree of accuracy and repeatability for the alignment of sophisticated photomasks to the substrate. This allows for the transfer of patterned layers with perfect accuracy onto the substrates. KARL SUSS MJB 3 consists of an optics-module, a precision-mechanical-alignment-module, and a stage-control-module, all combined in a universal platform. The optics-module contains an infinity-corrected Koehler-type illuminator which produces a parallel illuminated cone of light beams. The light-imaging system consists of beam-splitting, refractive-imaging, and motorized-magnifications elements. The beam-splitting element separates the image field into four subfields which are focused onto the right and left lens elements of the optics-module in order to facilitate the simultaneous alignment of multiple photomasks. The precision-mechanical-alignment-module is equipped with motorized elements that allow an extremely accurate and repeatable positioning of the masks. The system guides the movement of the mask frame along the X and Y axes using linear encoders and a scan-head for alignment. It also has a cross-polarizing-beam-splitter for the high-accuracy position sensing and a stroke-length sensor for the correct positioning of the masks. The stage-control-module consists of three stage elements. The two main stages provide precise scanning of the photomasks, while the adjustable stage provides precise motion of the masks on the X and Y axes. The main stages include two precision-positioning motors for the X and Y scanning axes and a rotation-axis for rapid and reliable rotation of the samples. The adjustable stage has a linear encoder for the measurement of the reticle shift. MICROTEC MJB 3 includes real-time imaging, integrated software, and a variety of compatible accessories. The system also has a self-test function that conducts a diagnostic check of all modules and components. All of these features make KARL SUSS MJB3 a high-performance, versatile mask aligner with excellent stability and accuracy.