Used KARL SUSS / MICROTEC MJB-3 #293777763 for sale
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KARL SUSS / MICROTEC MJB-3 is an advanced automated mask aligner used for photolithography. The mask aligner processes integrated circuit (IC) masks, with an 8" x 8" maximum size for the substrate, with a series of alignment and exposure operations. The equipment consists of an advanced optical assembly, 6" diode laser, and digital feedback control systems. This unit works in either manual or semi-automatic (programmable) mode, which allows a variety of parameter combinations of alignment, exposure and conveyance patterns to be set up. The light source is a diode laser that is used to align and expose the masks, the laser control system aligns the mask pattern with the photoresist. The laser light is destigmatized and focused by the projection optics to achieve submicron accuracies, while the shadows (intensity) of the mask patterns can be resolved on the substrate with ± 5μm accuracy. The light intensity is electronically controlled and can be adjusted between 5mW to 25mW without any physical modifications to the unit. The mask itself is mounted on a stepper motor stage, and is driven by a powerful stepping motor. Mask alignment is achieved with precision and speed, ensuring the patterns are exactly overlaid to the desired photoresist. The machine is adaptable to a variety of operating conditions, from wafers to integrated circuits or complex patterns. The unit is fully automated, with vacuum systems, automatic mask handling and a built-in wafer mapping tool. This ensures a fast and reliable photolithography process. The substrate alignment asset is equipped with an advanced vision model for precise mapping, with a flat plane and high accuracy of ± 0.14mm. To ensure safety, MICROTEC MJB3 is equipped with a safety shutter to prevent any residual laser light reaching the user. KARL SUSS MJB 3 is suitable for cutting-edge photolithography equipment, with fast alignment and exposure speed, precise mask patterns and high repeatability. As a result, it is an essential tool for any IC design and manufacturing lab.
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