Used KARL SUSS / MICROTEC MJB-55 #9131891 for sale

KARL SUSS / MICROTEC MJB-55 is a high-precision 5-axis mask aligner with wafer handling capabilities. It is designed to transfer patterns of a photomask precisely onto a photoresist-coated substrate. MICROTEC MJB-55 utilizes a unique combination of PC-controlled precision 5-axis linear and rotational motions, enabling it to accurately transfer and align patterns on to the substrate. The equipment is designed to offer fast and accurate pattern transfer times and is ideal for mask processes such as high-speed lithography or rapid prototyping. KARL SUSS MJB55 can accommodate up to 6" substrates and provides a standard x-y stage with a maximum travel of 160 mm. It has multiple stage configurations, including single, double, or triple mask stages, with linear servo-motor and encoder technology for high-accuracy alignment that requires low maintenance. The x-y-θ-φ-w alignment stages offer operational flexibility along with excellent repeatability. Additionally, the focus/z range of 0-50 μm enables a stable focus during the pattern transfer process. KARL SUSS MJB-55 is equipped with a high-speed stage for wafer size handling that supports a variety of processes. It also offers wafer dilation/expansion and temperature control to improve the alignment and exposure times. The wafer handling accessories can be configured for multiple substrate sizes and processes, such as spin coating, trough for liquid handling, wet and dry processing, sol-gel, PED, CMP, etc. Furthermore, the system comes with an integrated high-resolution imaging alignment unit and autofocus capabilities for real-time alignment and exposure. This enables fast and accurate pattern transfers and alignments of up to 1μm. The machine can be integrated into a production environment with its ability to be linked to a data collection tool. The Robot integration package helps mask makers optimize throughput and conserve cleanroom space. Additionally, the maintenance-free design and intuitive user interface of the asset provide easy maintenance and operation, making it ideal for a variety of production applications.