Used MIDAS MDA-400LJ #9094346 for sale

MIDAS MDA-400LJ is a high precision mask aligner that is specially designed for the aligning and exposure of flat masks used in microfabrication applications. The device consists of a substrate holder that supports a single or multiple flat mask pattern plates, an excimer laser light source, and a 3-axis linear motor driving system. The laser light source may be used to irradiate a selected pattern plate with a preset dose. The 3-axis linear motor system is used to precisely control the distance between the pattern plate and the substrate holder, thereby ensuring perfect alignment between the two elements of the device. The substrate holder is driven by an optical encoder that precisely aligns the substrate for exposure. The encoder measures the distance between the pattern plate and the substrate with respect to the reference position, which is defined as the intersection of the X, Y, and Z axes. This information is then used by the device to adjust the position of the pattern plate, in order to accurately align the substrate. MDA-400LJ is equipped with a X-Y table with a resolution of 0.2 µm, allowing for precise control of the movement of the substrate holder and adjusting its position as necessary. Additionally, the device also offers an integrated linear encoder, which ensures very high stability of the substrate position during exposure. Furthermore, the device provides a high-resolution reticle that reduces the pitch error between adjacent masks, ensuring ultra-fine pattern registration. The device is highly reliable and is designed to operate repeatedly in a wide temperature range. Additionally, MIDAS MDA-400LJ is designed to be integrated with automatic mask loader systems, allowing the device to operate in continuous operation mode. The device is also equipped with a full range of safety features and can be powered by either AC or DC power sources. Overall, MDA-400LJ is an excellent mask aligner that is suitable for many microfabrication applications. Its high precision features and stability, as well as its safety features, make it an ideal device for mask aligning and exposure in the microfabrication process.