Used MIDAS MDA-60FA #9404360 for sale

MIDAS MDA-60FA is a multi-beam laser mask aligner developed by MIDAS. It is used in the production of semiconductor chips and microelectronic devices by providing exact positioning, alignment and rapid manipulation of photomasks and substrates. MDA-60FA has an 18-inch full circle, 6-axis computer-controlled motion control. It features multiple scan frequencies, laser powers and resolutions that can be adjusted for precision alignment. MIDAS MDA-60FA utilises a high precision dual stage axis module with integrated MCAT linear synchronisation and XY coarse movements. It's X-Y-Z stage has a positioning accuracy of +/- 1.0 micron, repeatability accuracy of 0.3 micron and a 1 mm/s velocity with 0.02μm/s acceleration. MDA-60FA is compact, with a footprint of 855x855x1400mm and a weight of 155kg. MIDAS MDA-60FA's laser source is a pulsed 185nm laser with a pulsewidth of 20 - 100ms and up to 175mJ energy per pulse. It has a minimum mounted repeatability of 1µm, a minimum beam alignment error of 0.25µm and a focus depth of 2-5µm. The laser spot size is adjustable from 5-100μm, with a minimum accuracy of 0.2μm. MDA-60FA has a full range of software features to enable repeatable alignment with quick alignment set-up time. Its software supports numerous lithography formats, provides auto alignment and distortion correction, and supports an extended checkerboard calibration for higher accuracy alignment. The integrated MCAT Laser Synchronization feature ensures ultra accurate high speed alignment by continuously aligning laser sources and image processing. Overall, MIDAS MDA-60FA is an industry leader in precision alignment for semiconductor and MEMS applications. The combination of its advanced motion control, dual stage module, laser sources and comprehensive software features provides optimal performance for ultra-precise alignment with cost-effective operation.