Used MIKASA MA-20 #9279286 for sale
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ID: 9279286
Vintage: 2005
Mask aligner
Substrate has been used: Sapphire
2005 vintage.
MIKASA MA-20 mask aligner is a lithographic tool used to position thin-film layers onto the surfaces of semiconductor substrates. MA-20 is a high-precision, non-contact positioning equipment, capable of submicron accuracy, making it ideal for advanced lithography applications. MIKASA MA-20 is a photolithography system and it utilizes a mask table and a multipurpose stage to produce the desired pattern on the wafer surface. A vacuum chuck on the stage facilitates handling of the wafer surface. The MASK table comprises of a tabletop and a camera, which provides a reference to the field-of-view of the camera and the image projected by the illuminator. The MASK design can be chosen according to the requirements of the application, ranging from standard masks to custom-made patterns, and the accuracy of the images is maintained by the detector's automatic calibration. MA-20 also comes equipped with a multibeam, high-speed scanner and an illuminator in order to obtain the necessary illumination for the exposure process. The scanner can move with a maximum speed of up to 2000 mm/s, providing the necessary accuracy for a variety of applications. The illuminator has a variable intensity range from 1 to 100μW/cm2 and transmits a pattern corresponding to the designed mask, with a field-of-view of 6mm x 6mm for a single exposure. MIKASA MA-20 offers several features that enhance the lithography process, allowing for high-precision, non-contact alignment. These include an extremely low-temperature (LT) laser, a PCB optimized motor alignment unit, and an auto-alignment feature. Furthermore, MA-20 has an integrated imaging machine, which includes a microscope, an internal series of lenses, and an LCD display. This allows for an accurate inspection of samples before, during and after the photo-aligning process. The integrated rate controller ensures accurate alignment via a control feedback tool. In summary, MIKASA MA-20 is an advanced lithography tool designed to produce accurate thin-film layers onto semiconductor substrates. It offers a range of features for optimized alignment, including a multibeam scanner, high-speed scanner and illuminator, an LT laser, a PCB optimized motor alignment asset, and an auto-alignment feature. MA-20 also includes an integrated imaging model, and a rate controller to ensure accurate alignment.
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