Used OAI 2000SM #9256685 for sale

OAI 2000SM is a highly precise, computer-controlled mask aligner offered by OAI Corporation. The equipment is specifically designed for semiconductor device fabrication, and is ideal for patterning processes, such as optically writing, etching and developing of devices with minimum feature sizes as small as 1µm. 2000SM is a high-resolution two-axis servo motor-based system which has an enhanced accuracy of up to ±1µm in the X and Y axes. It also offers high throughput with a cycle time of just 1.7ms. The unit ensures excellent overlay accuracy, with a maximum 5µm alignment accuracy. It can also handle thick substrates up to 280mm thick. OAI 2000SM has a highly flexible machine architecture, allowing for the integration of various peripheral components to match the customer's specific requirements. The tool can be integrated with a variety of equipment, such as optical steppers, sputtering systems, batch spinners, etch systems, ion implanters and diffusion furnaces. The asset is built with a rigid aluminum base platen, which allows for unsurpassed flatness and accuracy. It also features a flat plate scan function which enables scanning of patterns for quick setup and realignment of the tool. This reduces the time taken to align the mask with the substrate, enabling faster response time. 2000SM is a highly reliable aligner that meets the stringent safety and repeatability standards set for semiconductor fabrication. It is equipped with safety interlocks on all doors and components, and it is compliant with ESD (electro-static discharge) standards. It also features an alarm model which can be set to alert the operator in case of any emergency, thus ensuring reliable operations. OAI 2000SM mask aligner is an ideal solution for high precision patterning of semiconductor devices. With its precise alignment accuracy, advanced equipment architecture, and robust safety and performance standards, the system is well adapted to the demanding requirements of the semiconductor industry.