Used OAI 806 MBA #293765592 for sale

OAI 806 MBA
Manufacturer
OAI
Model
806 MBA
ID: 293765592
Wafer Size: 6"
Mask aligner, 6".
OAI 806 MBA is a high-precision mask aligner designed for photolithography applications in the semiconductor, microelectronics, and related industries. It offers a comprehensive solution for aligning masks with substrates to create intricate patterns on semiconductor wafers or other photoresist-coated substrates. The mask aligner plays a crucial role in the manufacturing process of integrated circuits, MEMS devices, LED displays, and other microfabricated products. 806 MBA features advanced optical alignment technologies to achieve sub-micron alignment accuracy, essential for producing high-resolution patterns in nanoscale devices. The equipment consists of several key components, including an illumination system, alignment stage, mask holder, substrate holder, and control unit. The illumination unit typically includes a high-intensity light source, such as a mercury or xenon lamp, coupled with optical components like lenses, filters, and apertures to provide uniform and collimated illumination across the mask and substrate. The alignment stage of OAI 806 MBA allows for precise positioning of the mask and substrate relative to each other. It typically employs high-precision linear stages, rotary stages, or piezoelectric actuators controlled by sophisticated motion control algorithms. The multi-axis stage enables fine adjustments in the X, Y, and Z directions, as well as rotational alignments for achieving the desired overlay accuracy between the mask and substrate patterns. The mask holder and substrate holder are designed to securely mount and align the mask and substrate during the exposure process. The mask holder may incorporate features like vacuum chucking, mechanical clamping, or magnetic retention mechanisms to ensure stable and repeatable positioning of the mask. Similarly, the substrate holder may offer vacuum suction, mechanical clamps, or electrostatic chucking to hold the substrate in place during exposure. The control unit of 806 MBA comprises a user-friendly interface for setting exposure parameters, alignment routines, and process sequences. It may include programmable logic controllers (PLCs), graphical user interfaces (GUIs), and integrated software for automating alignment procedures, optimizing exposure settings, and monitoring machine performance. The control unit also interfaces with external devices like computers, metrology tools, and sensors for data logging, analysis, and feedback control. In operation, OAI 806 MBA follows a series of steps to produce patterned structures on substrates. The process begins with loading the mask and substrate onto their respective holders and aligning them using the optical alignment tool. The mask aligner then exposes the photoresist-coated substrate to UV light through the mask, transferring the pattern onto the substrate. After exposure, the substrate undergoes development, rinsing, and drying steps to reveal the patterned features. Overall, 806 MBA mask aligner offers a versatile and reliable solution for high-precision photolithography applications in microelectronics and semiconductor manufacturing. Its advanced optical alignment capabilities, precision motion control, and user-friendly interface make it a valuable tool for producing intricate patterns with sub-micron resolution. As technology advances towards smaller feature sizes and increased device complexity, OAI 806 MBA continues to play a vital role in enabling the production of next-generation microdevices and integrated circuits.
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