Used OAI HYBRALIGN 500 #133785 for sale
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ID: 133785
Mask Aligner, parts system
Lightsource, constant intensity controller, and alignment optics assembly are missing
Manual included.
OAI HYBRALIGN 500 is a powerful mask aligner ideal for advanced patterning technology in the production of integrated circuits. The device is available in three models: the HYBRALIGN 500A, 500B, and 500C, each designed to accommodate different thicknesses of masks and substrate. HYBRALIGN 500 is equipped with a projection imaging equipment that operates at a wavelength of 400nm to put laser light transmitted through a mask onto the photoresist of the substrate. The system is then able to record the positions of alignment marks on the mask and substrate through an existing or newly projected pattern. A precision motorized stage is also used to accurately target alignments to within as little as 2 microns. The unit is able to apply photoresist coatings before each alignment and exposure step and utilizes advanced pattern matching algorithms to perform high-precision alignment. Optional features such as automatic pattern matching, on-the-fly error correction, and hard real-time alignment can be added for increased efficiency, throughput, and lower total costs. OAI HYBRALIGN 500 also benefits from a compact, modular design that occupies minimal space, with a modular motion machine designed to meet the demands of a number of production tasks and technologies. Customizable software packages are available to facilitate the transfer of essential data such as alignment and exposure marks. The user-friendly graphical interface gives users the ability to set exposure parameters and view data without complex coding. In addition, HYBRALIGN 500 is compliant with SEMI industry standards and complemented by full technical support to ensure maximum operational efficiency and performance. It is the ideal solution for advanced lithography technology requiring high precision mask alignment and pattern transfer.
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