Used QUINTEL / NEUTRONIX Q7000 #293603582 for sale
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ID: 293603582
Wafer Size: 4"-8"
Vintage: 2001
Mask aligner, 4"-8"
Front and backside IR alignment
2001 vintage.
QUINTEL / NEUTRONIX Q7000 is a versatile mask aligner for aligning photomasks for single or multiple device patterning applications and providing precise processing of multiple devices with different characterization requirements. It can be used for microfabrication jobs, from basic device and circuit processing to the advanced technologies used in modern embedded systems. QUINTEL Q7000 features a two-axis precision motion stage, which provides sub-micron resolution of both the X and Y axes of the substrate. This stage is capable of relative speeds up to 25 cm/s, and controller programming features allow full automation of the patterning process. The process is also integrated with other environment operating systems, such as Windows, for easy operation with common software tools. For alignment applications, NEUTRONIX Q 7000 has an automated alignment module that uses a unique "stereo vision" approach to ensure precise alignments of the desired images and layers. This module utilizes precision-machined optics and unique refractive "stereo vision" techniques to ensure that the best alignment and most detailed image is achieved. QUINTEL / NEUTRONIX Q 7000's main feature is its dual-beam lithography equipment, which allows for high pattern fidelity on any planar surface. This utilizes two sets of diffraction optimized beam optics - one on the substrate and one on the mask - and features a wide focusing range that enables it to generate images of better than 0.1 um in line width. Additional features of the dual-beam lithography system include the ability to perform step and repeat operations with high throughput, as well as smaller feature sizes with improved lithographic contrast. Additional features of Q 7000 include an acid-resistance enclosure which can be used to keep the process chemicals away from the substrate, an advanced FOUP cleaning unit that is designed to prevent contamination of the process, and an integrated gas supply machine for delivery of appropriate purging gases. Q7000 is an advanced lithography tool that is well-suited for high-quality, high-precision patterning applications. With its sophisticated alignment capabilities, automated control software, dual-beam lithography asset, and other features, it is an ideal solution for microfabrication needs.
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