Used SEMI DARIN SDMA-12SA #293760484 for sale
URL successfully copied!
Tap to zoom
ID: 293760484
Wafer Size: 8"-12"
Vintage: 2023
Mask aligner, 8"-12"
Back Side Alignment (BSA)
Chiller
Vacuum chuck, 8"-12"
Mask holder, 8"-12"
Lamp house module:
LED Holder
(9) UV LED Light source modules
Wavelength: 365 nm
Intensity: 20 mW/cm²
Uniformity: ±4%
Top scale module:
Dual CCD Zoom
Dual X, Y, and Z Motorize
Objective spacing: 140-310
Back side module:
Dual CCD Motorize
Dual X, Y, and Z Motorize
Objective spacing: 140-270
Leveling stage module:
Auto leveling system
Manual X and Y Micrometer
Θ and Z-Axis motorizing
Z-Axis alignment gap: 20-200 µm
Temperature controller
Flow meter sensor
PC
Monitor
Data logging
Power supply
2023 vintage.
There are no reviews yet