Used SVG Micralign 600HT #9400549 for sale

SVG Micralign 600HT is a state-of-the-art mask aligner designed for photolithography processes. It is ideally suited to cover a broad range of application from minimum feature sizes as small as 1.2μm to 200μm in both step and repeat and full field alignments. The mask aligner consists of a process chamber, where the mask is held, and a wafer stage, where the wafers are placed for the exposure. Alignment is achieved with the help of a laser interferometer which detects a wafer's topography to finely adjust the position of the mask and wafer so that they're perfectly aligned. Micralign 600HT allows users to select from a wide range of illumination sources and magnifications producing sub-micron feature sizes. Not only this, but SVG Micralign 600HT also makes use of Chuck Impulse Technology which eliminates fluid mask damage and enables the throughput of up to 16.6 wafers per hour. Furthermore, the machine employs a 200mm stage instead of a 150mm stage, so it can accommodate more wafers and further improve throughput. The tool is equipped with a proprietary VariThermal Process Control (VPTC) equipment, which ensures that the mask and wafer remain at the proper temperatures during processing and alignment. This system features dynamic temperature control for optimal wafer and mask temperature compensation. With this unit, process settings can be quickly and easily adjusted to accommodate various environment and different mask materials. In addition, Micralign 600HT ensures an extremely high resolution, with a 33nm subpixel alignment accuracy and a warp-error of less than 1um. This makes it an ideal tool for advanced IC and BIOS technologies. Lastly, the machine is coupled with a very user-friendly software machine that makes operation and maintenance simple and easy, reducing downtime and increasing chip yield.