Used SVG / PERKIN ELMER / ASML 300 #40530 for sale

ID: 40530
Wafer Size: 4"
Projection Aligner, 4" Deinstalled.
SVG / PERKIN ELMER / ASML 300 is a mask aligner that provides precise control over substrate patterns with the alignment accuracy that is required for microstructural fabrication processes. This machine has a large control field of 352 mm (13.86 in.), and its stage can be moved accurately in the x, y and theta directions. With its integrated alignment mark sensors, users can easily detect markers in the substrate allowing precise alignment and alignment repeats over multiple substrates. SVG 300 also features a digital projection equipment for microfabrication processes. This system has a resolution of up to 0.25 μm, allowing users to accurately control the pattern of the substrates for sub-micron scale applications. The digital projection unit consists of digital optics and ultra-low distortion imaging components that offer superior image quality, high resolution imaging, digital equalization, and software controlled lens correction features. The mask aligner also features digital illumination, which provides precise illumination control that can be adjusted for different substrate types. Additionally, the mask aligner is equipped with an advanced projection tube that allows users to process small (down to 0.1 μm) patterns with high accuracy. ASML 300 also has a built-in substrate cassette machine that allows users to transfer substrates to and from the aligner quickly and easily. With the built-in lithography station, users can quickly process their substrates with superior homogeneity and high resolution accuracy. To ensure safe operation of PERKIN ELMER 300, the tool is equipped with advanced safety measures such as an inert gas enclosure, pressure sensors and an automatic safety cover in order to protect the optics from external damage and to detect gases that could cause damage to the asset components. In summary, 300 is a powerful mask aligner that provides controlled patterning of substrates with its large control field and digital projection model. It also features digital illumination, an advanced projection tube, built-in substrate cassette equipment, lithography station and safety measures which allow it to safely handle the microstructural fabrication processes with superior accuracy and homogeneity.
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