Used SVG / PERKIN ELMER / ASML 554 HT #9358414 for sale

SVG / PERKIN ELMER / ASML 554 HT is a state-of-the-art mask aligner designed for optical microassembly. The alignment equipment uses a combination of laser interferometry and digital imaging technologies to ensure precise placement of the photomask on the substrate. The photomask is positioned by a pair of linear motors, which control the angular orientation, and a high precision XY stage with a 0.01 micron repeatability. The linear motors can also be synchronized to allow for precise overlay alignment during double-sided photomask exposure. The system is also capable of overlay alignment compensation, to adjust for any dimensional differences between the photomask and the substrate. The exposure optics of SVG 554 HT is comprised of a pair of laser illuminators and an adjustable Koehler illumination unit. The machine employs a low-distortion optical tool, with a numerical aperture of 0.40 and a field size up to 4.8 mm. The laser illuminators are designed for peak power levels up to 36 mW/cm of laser power, and the Koehler lens is adjustable over a range of working distances. The exposure optics additionally include an optional reticle illuminator for imaging large-format wafers. ASML 554 HT is capable of processing substrates that are up to 4" in diameter and can be mounted with a vacuum chuck or a manual clamp. The asset includes a number of safety features, such as a physical interlock and a safety cover to ensure operator safety. The features of this state-of-the-art mask aligner include high-accuracy, high-speed positioning, and high throughput process control. With its precise optics and high-precision motion control systems, this model is ideal for photomask alignment and overlay in applications such as 3D wafer assembly, flip-chip bonder alignment, and LCD exposure and exposure metrology.