Used SVG / PERKIN ELMER / ASML 642 HT #9358411 for sale
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SVG / PERKIN ELMER / ASML 642 HT Mask Aligner is a high throughput mask aligner designed for the photolithography of microelectronic circuits and components. This state-of-the-art device features a fully automated, precision alignment equipment, a 6 inch x 4 inch substrate size, and a 0.3 μm micro-stepper auto-focus motion capability. This makes it ideal for the development and manufacturing of next-generation microelectronic devices with advanced mechanical, electrical, thermal, and optical properties. SVG 642 HT Mask Aligner is equipped with a high-precision XY table that provides a wide range of micro-step motions, in both the x- and y-axis, to improve the alignment accuracy and repeatability. With its stepper motor drive system, ASML 642 HT is capable of micro-movement traversing speeds of up to 600 m/min for rapid substrate scanning while the two stage auto-focus, fine alignment unit ensures maximum possible alignment accuracy down to 0.3 μm. Combined with its 8-bit gray scale drive and 12.7 μm pitch aluminum masking, this machine can process a wide variety of substrates including Si, SiO2, SiO2/Si, and Ge layers. PERKIN ELMER 642 HT Mask Aligner features a powerful multi-zone vacuum chuck tool, which ensures the proper clamping of the substrate and prevents heat and chemical residue buildup on the substrate surface. With its advanced gas flow controller, the asset can achieve a variety of conditioning regimes for resist processing, which is ideal for advanced device fabrication and design. 642 HT Mask Aligner is equipped with an advanced model controller for reliable and stable operation. Its modular design allows for convenient user programmability, which makes it suitable for a wide range of user-defined processes. Its intuitive user interface is designed for easy and safe operation with improved support for remote data collection and remote programming. Overall, SVG / PERKIN ELMER / ASML 642 HT Mask Aligner is an advanced tool for precision alignment and substrate scanning and processing that has been designed to meet the demands of microelectronics developers and manufacturers. With its high throughput motor drive, precision alignment equipment, fine alignment capabilities and gas flow control, SVG 642 HT is an ideal choice for any microelectronics development or manufacturing project.
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