Used SVG / PERKIN ELMER / ASML 651HT #9165928 for sale

ID: 9165928
Wafer Size: 5"
Mask aligner, 5" Process: Litho.
SVG / PERKIN ELMER / ASML 651HT is a mask aligner, a machine used to manufacture integrated circuits and incorporate them into components with which it comes in contact. It is an important tool for the fabrication of specialized computer chips or other semiconductor products and is used to transfer lithographic patterns from a mask to a substrate. SVG 651HT combines several image acquisition, wafer scanning, and process control systems, in order to accurately place patterned resists on a wafer. It offers an advanced, high-end mask aligner which is available in several configurations based on the user's needs. ASML 651 HT takes advantage of the latest in imaging and patterning technology. It is capable of both optical and electron beam patterning, which can be used for high throughput contact and proximity printing. ASML 651HT offers two precise wafer stages for repeatability and accuracy, and can be used to print layers with very precise alignment on the wafer. Its precision also helps in the fabrication of complex 3-dimensional products. SVG 651 HT has a vacuum load and unload station, a motorized opto-mechanical stage and air-bearing stages, an adaptive focusing equipment, a scan camera, an electron beam lithography tool, a conveyor belt, and a variety of support systems. All the components are enclosed inside a specially designed environment. PERKIN ELMER 651HT is equipped with automated control systems and exacting software algorithms for pattern creation, aligning, imaging, and printing. The software allows the designer to program mask layout and position to make the most of the machine's capabilities. It also offers a variety of features like CAD pattern import, molecular beam pumping for improved precision, and digitally controlled pattern rotations. 651 HT is designed for exceedingly reliable production and process control and the rigors of semiconductor production. It also offers very high-resolution imaging capabilities for applications in nanotechnology. The system features preventive maintenance functions to extend unit life and reduce unscheduled maintenance requirements. The machine is also designed for complete user compliance and offers complete traceability of the entire masking process. The SVFPERKIN ELMER 651 HT is a high-performance mask aligner that offers the highest level of precision available in lithography equipment. With its robust design and automated control systems, 651HT can be used to produce highly complex components with excellent yields.
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