Used SVG / PERKIN ELMER / ASML 651HT #9259119 for sale

SVG / PERKIN ELMER / ASML 651HT is a microlithography patterning tool commonly used in the production of semiconductor devices. It is an advanced, high-end tool with motion control accuracy and speed, allowing for higher resolution features and tighter feature placement. SVG 651HT is capable of providing a wide range of exposure characteristics, enabling designers to use shorter exposure wavelengths for smaller feature sizes and higher performance. ASML 651 HT features an ultra-precise stage platform for wafer placement and movement, with a maximum stage travel of 4500mm. Additionally, PERKIN ELMER 651 HT has a built-in, piezo-driven Focus Control Equipment (FCS) for optimizing exposure uniformity. The FCS ensures that all portions of the alignment marks or pattern remain in focus throughout the entire exposure process. 651 HT utilizes 2,4MHz Laser Pattern Generation (LPG) technology with advanced scan support for high speed and repeatable patterning. The system also features a Zoom Optics Unit (ZOS) that provides a very high degree of accuracy and control over the exposure process. In addition to the features mentioned above, ASML 651HT provides several other features designed to support advanced semiconductor processes. These include a full alignment subsystem, a Dry Film Striper (DFS) subsystem for post-exposure development, a high-precision Mask EDGE Adjustment Machine (MEAS) for placement and rotation optimization, and an Autofocus Optimization Tool (AOS). 651HT is designed for easy maintenance and reliability. It features on-board process diagnostics, an integrated calibration tool to ensure accurate results, and a temperature and humidity control asset for optimized alignment and printing accuracy. Additionally, its open architecture allows for easy updates for new mask types. In summary, SVG 651 HT is a versatile tool that provides advanced capabilities for precision wafer processing. It is designed to offer reliable, repeatable results in a wide range of applications. With its ultra-precise stage platform, built-in Focus Control Model, 2,4MHz Laser Pattern Generation technology, and other features that support advanced semiconductor processes, SVG / PERKIN ELMER / ASML 651 HT is an ideal choice for high-end semiconductor production.