Used SVG / PERKIN ELMER / ASML 664 HT #9165930 for sale

SVG / PERKIN ELMER / ASML 664 HT Mask Aligner is a state of the art alignment tool used for microfabrication processes. It is a hybrid lithography equipment that combines photolithography (mask alignment) with electron beam lithography (patterning) for submicron patterning of materials. SVG 664 HT Mask Aligner is a semi-automatic tabletop system that uses an X-Y translation stage and two rotating stages for fine alignment of patterned masks with the substrate. An inverted microscope on the unit allows the user to visually confirm the alignment and pattern position. An alignment accuracy of better than 4 µm in ± 90° and an angular accuracy of 3° are typical when using ASML 664 HT Mask Aligner. The machine includes a separate electron beam patterning section with three column arrangement. The electron beam writing column consists of a control module, a microchannel plate detector, a projection lens and an X-Y alignment stage. A separate working distance control module allows adjustment to the vertical positioning of the sample and mask. The E-beam column can be used for applications such as electron beam lithography, resist writing, or pattern repairing. The tool is equipped with a light source with a slit-light source unit for varying slit sizes and spot size. It is suitable for the use of commonly used masks like chrome masks with transmission and reflection mode. The integrated design allows for quick and efficient mask alignment for precision patterning. The patterned masks can be loaded onto 664 HT with a digital image projection asset. The user can load images of the mask onto the model and the mask is then aligned automatically. Once properly aligned, the mask can be sealed with an anti-reflection coating. PERKIN ELMER 664 HT also offers advanced automation features such as automated mask selection, focus scanning, and alignment optimization. The equipment allows for both fast and accurate patterning with very high-resolution results. SVG / PERKIN ELMER / ASML 664 HT is a versatile and reliable masked aligner and lithography system that provides a precision platform for many advanced lithography applications. With its wide range of features and easy operation, SVG 664 HT is the perfect choice for the high tech laboratories and fabrication facilities.