Used SVG / PERKIN ELMER / ASML M641HT #9220746 for sale

SVG / PERKIN ELMER / ASML M641HT
ID: 9220746
Wafer Size: 4"
Mask aligner, 4".
SVG / PERKIN ELMER / ASML M641HT is a high-end mask aligner commonly used in the semiconductor industry. It is a highly automated equipment, capable of handling a variety of mask sizes from full size 7-inch to 8-inch down to as small as 8-microns. SVG M641HT mask aligner utilizes a 4-way-breadboard alignment system to precisely locate the substrates, coverslips and reticles within the aligner's chamber. Through this unit, substrate-to-reticle alignment can be easily achieved, which allows the machine to work at high precision and accuracy. In addition, the tool also supports multiple mask aligners, providing flexibility in your production and testing needs. ASML M641HT features a wide range of control systems, designed to give you precise control over the process. This includes controlling the beam path, focus, and exposure, as well as automated stage alignment. The advanced control asset also helps to ensure the quality of the process, making it easier to achieve high-yield runs. The model uses a pyramidal galvanometer-based laser equipment to provide uniform illumination. This laser generates around 1mW of power, and the beam spot can be varied between 20 and 160 microns in order to accommodate different reticle sizes. The precision of the beam path can be adjusted in real-time, ensuring maximum alignment accuracy. The system can be used with a variety of materials, such as Si, polyimide, GaN, GaAs, and more. It supports a variety of imaging processes, including contact reticle to wafer, open reticle to wafer, localized inverted double exposure (LIDE), flash-free exposure (FFE), and multi-layer imaging. In addition to its imaging capabilities, PERKIN ELMER M641HT also supports other process steps, such as overlay, CD-tolerance measurement, and depth tuning. This allows you to use the unit for a range of applications, including lithography, deposition, dry etching, and more. M641HT is an automated machine that provides high accuracy and precision, making it an ideal choice for semiconductor companies looking for a reliable tool to produce high-quality products. Through its advanced control capabilities and laser asset, SVG / PERKIN ELMER / ASML M641HT can handle most imaging process requirements.
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