Used SVG / PERKIN ELMER / ASML Micralign 330HT #128862 for sale
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SVG / PERKIN ELMER / ASML Micralign 330HT is a state-of-the-art mask aligner equipment that is designed to facilitate submicron alignment of chip elements to patterns on wafers. This system offers outstanding speed, accuracy and throughput, making it ideal for applications such as photomask fabrication, device fabrication, advanced lithography, and others. The main components of SVG Micralign 330HT unit are the mask frame, refractive optics, lens assembly, alignment table, and two-dimensional (2D) cross-engine. The mask frame is designed with a double- or four-sided swing modular mask, making it possible to operate with multiple masks at different positions. The refractive optics ensure a clear, high-resolution view of the target patterns during alignment. The lens assembly is also adjustable in order to obtain the best focus of alignment. The alignment table comprises two rounds of two-dimensional adjustment, allowing for precise adjustment of the mask position so that the target pattern can be aligned with the wafer. The 2D cross-engine uses a pair of 2D cross-hatches and a pair of moving stages with linear encoder to measure the distance between the target and the wafer. The Mask Aligner Controller (MAC) acts as the brains of the operation, allowing the user to easily select and configure the desired alignment settings. This controller consists of the alignment window that shows the position of the mask on the stage, and a control set that includes integrated functions to ensure automatic alignment with up to 10 microns accuracy. Additionally, the MAC is equipped with an Autofocus capability that brings the focus of the mask to the desired point for optimal resolution. The common operating modes of ASML Micralign 330HT machine include single mask align, auto-align to wafer, manual align to wafer, and all three of the modes combined. For example, in the auto-align to wafer mode, the optimization parameters will adjust automatically as the wafer moves. The combination of single, auto-align, and manual align modes allows users to work with different resolutions and patterns. Overall, Micralign 330HT is a highly versatile mask aligner tool. It can handle a variety of chip elements with accuracy and speed, making it an ideal choice for advanced lithography, device fabrication, and photomask fabrication. Featuring an intelligent Mask Aligner Controller, adjustable optics, adjustable lens assembly, and a two-dimensional cross-engine, this asset can significantly reduce setup time and still deliver outstanding alignment results.
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